Test Grating for Lateral Calibration Select:Test grating TG3D-3000/600, pillars, unmounted 70 Cantilever Geometry: Rectangular Cantilevers

70 Cantilever Geometry: Rectangular Cantilevers Number: 1 Front Side Coating: Conductive Diamond Back Side Coating: Reflective Aluminum

3 BAR PATTERNS from

please see model MSNL-10

During scanning in contact mode using a 0

and a magnetic moment of 0

Test Grating for Lateral Calibration Select:Test grating TG3D-3000/600, pillars, unmounted 70 Cantilever Geometry: Rectangular CantileversDESCRIPTION The TG3D 3000 600 test grating with its 3 Dimensional array is intended for lateral calibration of SPM scanners, detection of lateral nonlinearity, hysteresis, creep, cross coupling effects and for determination of the tip aspect ratio. Structure: Si wafer with grating in top surface Pattern type: Chessboard like array of square pillars with sharp undercut edges Height: 0. 3 0. 6m Top square size: 1. 2 x 1. 2m Edge radius: 10nm Period: 3