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The imec CAMS resolution qualification structures consist of a thin uniform layer of SiO2 confined between highly-doped grown poly-Si and implanted Si
8N/m spring constant
5 Tip Radius (Nom): 5 Tip Radius (Max): 12 Tip Set Back (Nom): 5 Tip Set Back( RNG): 0 - 7
and contact mode
95 Cantilever Thickness (RNG): 2
PFDT750 190 kHz The imec CAMS resolution qualificationDESCRIPTION TIP SPECIFICATIONS CANTILEVER SPECIFICATIONS High aspect ratio probe for repeatable, accurate depth metrology and imaging on challenging structures such as deep trenches and pits, as encountered on semiconductor samples and optics. Designed for PeakForce Tapping operation on Dimension Icon. 750nm tall spike with 10nm end radius and 65nm base width Tip Geometry: Rotated (Symmetric) Tip Height: 3 8 Front Angle: 15+ 2 Back Angle: 25+ 2 Side
