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400nm-Wide-Spike @ 6µm DESCRIPTION
The MRS-6 is traceable to the National Physical Laboratory (NPL) in the U
for CPII / Innova
(Note: Tips are not coated)
Unmounted for CPII / Innova AFMs
144nm Very High Resolution 2D Calibration Standard for AFM Styli 400nm-Wide-Spike @ 6µm DESCRIPTIONDESCRIPTION Precision, holographic pattern providing accurate calibration in the horizontal plane for very high resolution, nanometer scale measurements with 144nm pitch. Period: 144nm pitch, two dimensional array. Accurate to 1nm. Refer to calibration certificate for actual pitch. Surface: Aluminum bumps on Silicon, 4x3mm die. Bump height (about 90nm) and width (about 75nm) are not calibrated. Usability: the calibrated pattern covers the entire chip.
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